首尔大学团队实现亚伏 HZO 铁电电容,面向 DRAM 级存储
Fast, Sub-Volt HZO Ferroelectric Capacitors For DRAM-Like Memory (SNU)
首尔大学牵头的研究团队发表论文,称通过等离子体工程制备(111)取向 TiN 电极,抑制界面氧化,使 5 nm Hf0.5Zr0.5O2 电容在 0.6 V 下实现饱和翻转。
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Seoul National University-led researchers published “Resolving the Kay–Dunn limit and the speed–endurance dilemma in ferroelectric Hf0.5Zr0.5O2 for DRAM-class sub-volt capacitors.” Abstract “Ferroelectric hafnium zirconium oxide can increase charge density in scaled capacitors, but its high coercive field limits the low-voltage, high endurance switching required for dynamic random-access memory and embedded ferroelectric memories. Here we show that plasma-engineered... » read more The post Fast, Sub-Volt HZO Ferroelectric Capacitors For DRAM-Like Memory (SNU) appeared first on Semiconductor Engineering .
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来源:Semiconductor Engineering · semiengineering.com